Argon Plasma Treatment

Product Detail

Description of argon plasma treatment

Equipment Model: PR80L-S3

Machine weight: about 450KG

Power rating: 5KW

Machine power supply: AC-380V/three-phase five-wire

Specifications of argon plasma treatment: 1000mm(W)×960mm(D)×1720mm(H)

Vacuum chamber specifications: 500mm (W) × 400mm (D) × 400mm (H) can be customized according to the product

Electrode plate size: 490mm(W)×320mm(D), 6 layers, Pitch spacing: 60mm, any combination

The maximum single-treatment area: 440mm (W) × 305mm (D)

Bracket mode: custom aluminum bracket structure

Capacity of argon plasma treatment: According to product specifications

Processing time: different process, different processing time

Plasma generator power: RF 13.56MH z, 0-500W adjustable

Vacuum Pump System: Type 90 Mechanical Oil Rotary Vane Vacuum Pump

Vacuum Measurement System: Pirani Vacuum Gauge

Working vacuum degree: 20-60Pa

Vacuum pump limit pressure: 4.0×10-1Pa

Vacuum time: =60S

Breaking vacuum time: 20-60S

Gas supply method: solenoid valve type

Flowmeter adjustment range: 0-300Sccm (ml/min)

Input air pressure monitoring system: 2 air pressure decompression tables, 2 gas mass flow meters

Operation method: manually take and place the workpiece, start automatic control with a key

Using of argon plasma treatment:

different combinations for different process manufacturing, can be used for devices, metal-based workpieces, ceramics, glass and other workpiece surface cleaning, modification and so on.




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