Oxygen Plasma Surface Treatment

Product Detail

Description of oxygen plasma surface treatment

Machine Model: PR80LW

Equipment weight: about 300KG

Rated power: 3KW

Machine power supply: AC-380V/three-phase five-wire

The overall specifications: 1320mm (W) × 1030mm (D) × 1720mm (H)

Vacuum chamber size: 450mm(W)×450mm(D)×400mm(H)

Electrode plate specifications: 410mm (W) × 435mm (D), any combination

Single-layer treatment of the largest area: 340mm (W) × 305mm (D)

Capacity of oxygen plasma surface treatment: According to product specifications

Processing time: different process, different processing time

Plasma generator power: RF 13.56MH z, 0-500W adjustable

Vacuum Pump System: Mechanical Vacuum Pump

Vacuum Measurement System: Pirani Vacuum Gauge

Working vacuum degree: 20-60Pa

Vacuum pump limit pressure: 4.0×10-1Pa

Vacuum time: =50S

Breaking vacuum time: 20-40S

Gas supply method: solenoid valve type

Flowmeter adjustment range: 0-300Sccm (ml/min)

Input air pressure monitoring system: 2 air pressure decompression tables, 2 gas mass flow meters

Operation method: manually take and place the workpiece, start automatic control with a key

Application of oxygen plasma surface treatment:

different combinations for different process manufacturing, can be used for devices, metal-based workpieces, ceramics, glass and other workpiece surface cleaning, modification and so on.




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